Stress engineering during metalorganic chemical vapor deposition of AlGaN/GaN distributed Bragg reflectors
نویسندگان
چکیده
منابع مشابه
Metalorganic chemical vapor deposition of InGaAsN using dilute nitrogen trifluoride
The metalorganic chemical vapor deposition of In0.06Ga0.94As1 xNx, with x 1⁄4 0.00–0.02, has been examined using nitrogen trifluoride (NF3) and tertiarybutylarsine. The solid N/V ratio increased linearly with the gas-phase N/V ratio up to a limit of 2.0% nitrogen in the film at a gas N/V 1⁄4 0.35. No further increase in nitrogen content could be achieved at a growth temperature of 550 1C unless...
متن کاملMETALORGANIC CHEMICAL VAPOR DEPOSITION AND INVESTIGATION OF ALGAINN MICROSTRUCTURE by
......................................................................................................... x
متن کاملSurface Chemical States of Heteroepitaxial Nitride Films on Sapphire by Metalorganic Chemical Vapor Deposition
Surface chemical states of GaN, AlGaN and InGaN by metalorganic chemical vapor deposition, and the influence of different dopants are studied with X-ray Photoelectron Spectroscopy (XPS). The results show that for most of the samples the N 1s peak can be fitted with a dominant GaN peak and a small N–H peak, while Ga 3d can be deconvoluted into three peaks from elemental Ga, GaN and Ga2O3. Si-dop...
متن کاملReflectance Mapping of Semiconductor Distributed Bragg Reflectors
We describe the design, construction and performance evaluation of a spectrally resolved reflectance mapping setup. The setup is capable of mapping a full 2 inch diameter semiconductor wafer, with a best spatial resolution of 50μm. The operating wavelength range is from 0.35μm to 1.05μm with spectral resolution of ~1nm. We have used this setup for reflectance mapping studies on distributed Brag...
متن کاملFlexible Distributed Bragg Reflectors from Nanocolumnar Templates
Recently, another alternative route to the use of purely polymeric structures to attain fl exible Bragg mirrors, and in which enhanced dielectric contrast is achieved, has been successfully demonstrated. [ 22,23 ] Such method takes advantage of multilayers possessing an open porous and interconnected network, which arises as a result of piling up layers of nanoparticles, to infi ltrate a polyme...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2001
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.1371240